2012

Nanometrology of periodic nanopillar arrays by means of light scattering

by Andreas, Heinrich

F. Widulle, V.D. Calzadilla, E. Gridneva, H. Wegendt, B.H. Kleemann, and A. Heinrich, 9th international conference on Multi-Material Micro Manufacture, doi:10.3850/978-981-07-3353-7_312, 2012