Nanometrology of periodic nanopillar arrays by means of light scattering
von Andreas, Heinrich
F. Widulle, V.D. Calzadilla, E. Gridneva, H. Wegendt, B.H. Kleemann, and A. Heinrich, 9th international conference on Multi-Material Micro Manufacture, doi:10.3850/978-981-07-3353-7_312, 2012